TAIWAN HIGH-TECH FACILITY ASSOCIATION
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Keynote Speaker
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Peter Csatáry ​資深技術副總/麥士特系統科技
​
Topic
Exploring Opportunities to make Wafer Fab Facilities Systems Smarter
使晶圓廠房設施系統造更智慧化之機會探討
 
Abstract

The term Smart Factory or “Smart Fab” is often used specifically in conjunction with the manufacturing process in the cleanroom of the semiconductor wafer fab. In this case, Smart Fab approaches typically comprise the combination of even more sophisticated Manufacturing Execution Systems (MES), process tool engineering data monitoring systems, Enterprise Resource Planning (ERP) Systems, as well as sophisticated product tracking and automated material handling and storage systems (AMHS). This results in improved flexibility and utilization of the production line, as well as the related supply chain for wafers, masks and other consumables.

The development of smarter fabs can also be extended to the cleanroom and the peripheral facilities that supply to and dispose of process-critical and general utilities required by the production line. This presentation focuses on potential measures to improve the efficiency, sustainability and stability of facility systems by applying Smart Fab principles and techniques such as sensors, in-situ measurements and controls as well as remote service and maintenance. Furthermore, the development and important role of the Facility Management Control System (FMCS) and its potential integration with other IT systems in a wafer fab to make facility systems smarter is examined.    
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  • 首頁
    • 緣起
    • 任務
    • 合作範疇
  • 活動
    • 高科技廠房設施國際論壇
    • 產品與技術研討會
    • 會員大會
    • 其他活動 >
      • 指導理事會議
      • 工作坊
  • 指導理事會
    • 第一屆指導理事會
    • 第二屆指導理事會
    • 第三屆指導理事會
    • 第四屆指導理事會
  • 核心工作小組
    • 第一屆核心工作小組
    • 第二屆核心工作小組
    • 第三屆核心工作小組
  • 委員會會員
    • 高科技廠房業主
    • 半導體供應商
    • 廠房設計建造業
    • 學術研究單位
  • 加入我們
  • English