Speaker
柯安 (Anderson Ko) 副總經理/奇鼎科技
柯安 (Anderson Ko) 副總經理/奇鼎科技
Topic
精密製程微環境氣流設計分析與驗證
Abstract
精密製程微環境氣流設計分析與驗證
Abstract
- Air Circulation System
- Precise Temperature & Humidity Control
- Flow field Control
- Air Flow Status Simulation
- Experiment and Test
- Case Study of CHD